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Surfscan SP1 DLS
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Unpatterned Surface Inspection
surfscansp1dls Product Description
The Surfscan SP1DLS unpatterned wafer inspection system captures yield-limiting defects down to 50nm at high throughput, accelerating yield learning across all process modules at the 0.13µm design rule and below. With complete defectivity and haze information provided in a single scan, the Surfscan SP1DLS delivers the information required for wafer and integrated circuit manufacturers to rapidly develop and ramp their processes for advanced device production.
 
  • Dual-laser illumination with simultaneous darkfield and brightfield modes enables detection of a wide range of defects at a high capture rate in a single pass
  • Simultaneous collection of haze information provides detailed information on wafer surface quality
  • The optional Backside Inspection Module (BSIM) provides fully automated, non-destructive inspection of the backsides of unpatterned and patterned (product) wafers
  • Real-time defect classification (RTDC) enables filtering of nuisance defects and noise, and accelerates root-cause analysis
  • Matching with the industry-leading Surfscan SP1TBI platform allows the transfer of recipes and calibration curves from the Surfscan SP1TBI
  • Full wafer-edge handling capability enables inspection for frontside defects without backside contact
  • Bridge platform supports 200mm and 300mm wafer sizes and meets 300mm factory automation requirements

Applications

Wafer:With high sensitivity to a wide variety of yield-limiting defects and simultaneous collection of haze data, the Surfscan SP1DLS provides wafer manufacturers with fast and accurate process development and final inspection capabilities.

IC: The Surfscan SP1DLS is used for process monitoring and tool qualification in all modules; incoming quality control of substrates; and for minimizing yield-limiting defects during advanced process development.

OEM: With high sensitivity at high throughput, the Surfscan SP1DLS is well-suited for the characterization and qualification of process tools.

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