Product Description

The Aleris 8310 is a reliable, industry leading throughput, production solution for thick and simple films applications. This product wafer films metrology system is extendible to meet the growing needs of customers.

• Increased throughput of 30% to 60% allows for high sampling required for 45nm devices
• Highest reliability due to improved hardware components and leading edge software architecture and database.
• Modular design allows for easy extendibility and upgradeability to fab needs and future node requirements

Application

Thick simple films in CMP, Litho modules, and SOI wafer manufacturers

Comprehensive Films Metrology Control

The Aleris 8500 (advanced thickness, composition and stress metrology), Aleris 8350 (thickness, refractive index, and stress metrology), Aleris 8310 (thick simple films metrology), Quantox XP (in-line real-time electrical monitoring and characterization), and Rs-200 (resistivity metrology) provide comprehensive films metrology control using optical and electrical topography measurements.

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